Grant Detail

Grant Name:

Electron Beam Lithography System

Organization:

Massachusetts Institute of Technology, Department of Physics

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Science

Date Awarded:

Aug 2011
Amount:

$500,000
Term:

14 months
Grant ID:

GBMF2932
Funding Area:

Science

To provide support for the acquisition of a next generation electron beam lithography system to enable unique research and advances in electronics, photonics, physics, chemistry, materials science, bioengineering, and nano-electromechanical systems. The electron beam lithography system will enable premier research for national, regional, and local users from universities, industry, and U.S. national laboratories.

Massachusetts Institute of Technology, Department of Physics (44)

Organization

Massachusetts Institute of Technology, Department of Chemistry
- amount
  $1,122,137
- term
  48 months
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Title
Molecular Approach to Quantum Sensing

Date Awarded
Oct 2024
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,483,103
- term
  60 months
Learn More
Title
New Forms of Matter Enabled by Strong Magnetic Interactions

Date Awarded
Oct 2023
Organization

Massachusetts Institute of Technology, Department of Materials Science and Engineering
- amount
  $1,094,375
- term
  36 months
Learn More
Title
Making High-Temperature Superconductors at Ambient Pressure

Date Awarded
Apr 2023
Organization

Massachusetts Institute of Technology, Department of Chemistry
- amount
  $1,000,000
- term
  38 months
Learn More
Title
An Electrical Potential Atlas for Green Chemical Catalysis

Date Awarded
Sep 2022
Organization

Massachusetts Institute of Technology, Department of Chemical Engineering
- amount
  $750,000
- term
  26 months
Learn More
Title
Advancing Design and Synthesis of Sustainable Polymers

Date Awarded
Aug 2021
Organization

Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science
- amount
  $675,000
- term
  36 months
Learn More
Title
Max Shulaker Moore Inventor Fellow Award

Date Awarded
Jul 2021
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,600,000
- term
  60 months
Learn More
Title
Pablo Jarillo-Herrero Experimental Investigator Award

Date Awarded
May 2020
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,600,000
- term
  60 months
Learn More
Title
Nuh Gedik Experimental Investigator Award

Date Awarded
May 2020
Organization

Massachusetts Institute of Technology, Department of Chemistry
- amount
  $56,250
- term
  14 months
Learn More
Title
The Second Scialog: Chemical Machinery of the Cell II Research Competition

Date Awarded
Feb 2020
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,870,000
- term
  60 months
Learn More
Title
Joseph Checkelsky Materials Synthesis Investigator

Date Awarded
Nov 2019
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,157,219
- term
  66 months
Learn More
Title
Emergent Phenomena in Quantum Systems Theory Center

Date Awarded
Jul 2019
Organization

Massachusetts Institute of Technology, Education Arcade
- amount
  $840,400
- term
  18 months
Learn More
Title
Alternate and Augmented Reality Games for Public Engagement with Science

Date Awarded
Nov 2018
Organization

Massachusetts Institute of Technology, Knight Science Journalism Program
- amount
  $294,271
- term
  24 months
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Title
Improving the Practice of Fact-checking in Journalism

Date Awarded
Nov 2018
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,026,644
- term
  40 months
Learn More
Title
Seeing The Invisible: A New Revolution in Cell Biology through Infrared Imaging

Date Awarded
Sep 2018
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,517,000
- term
  60 months
Learn More
Title
Fellows Support to Advance the Physics of Living Systems

Date Awarded
Mar 2018
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,138,613
- term
  36 months
Learn More
Title
Development of a Quantum Gas Microscope for Ultracold Molecules

Date Awarded
May 2017
Organization

Massachusetts Institute of Technology, Kavli Institute for Astrophysics and Space Research
- amount
  $6,696,344
- term
  60 months
Learn More
Title
New Instrumentation for Investigations of the Cosmic Dawn

Date Awarded
Feb 2017
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $56,250
- term
  14 months
Learn More
Title
The Second Scialog: Molecules Come To Life Research Competition

Date Awarded
Jul 2016
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,800,000
- term
  60 months
Learn More
Title
Nuh Gedik Experimental Investigator in Quantum Materials Award

Date Awarded
Nov 2014
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,800,000
- term
  60 months
Learn More
Title
Pablo Jarillo-Herrero Experimental Investigator in Quantum Materials Award

Date Awarded
Nov 2014
Organization

Massachusetts Institute of Technology, Department of Physics
- amount
  $1,273,415
- term
  50 months
Learn More
Title
Fellows Support to Advance the Physics of Living Systems

Date Awarded
Nov 2014
Organization

Massachusetts Institute of Technology, Office of Sponsored Programs
- amount
  $693,247
- term
  38 months
Learn More
Title
In Silico Simulation of Matter Driven Far from Equilibrium

Date Awarded
Nov 2014
Organization

Massachusetts Institute of Technology, Office of Sponsored Programs
- amount
  $594,000
- term
  18 months
Learn More
Title
IMG-ProPortal: A data discovery environment for Prochlorococcus related ‘omics data

Date Awarded
Oct 2014
Organization

Massachusetts Institute of Technology, Office of Sponsored Programs
- amount
  $200,000
- term
  12 months
Learn More
Title
Focused Ion Beam/Scanning Electron Microscope for Nanotechnology Research

Date Awarded
Sep 2014

date	grant	program	term	amount

date Oct 2024	grant Molecular Approach to Quantum Sensing	program Science	term 48 months	amount $1,122,137

date Oct 2023	grant New Forms of Matter Enabled by Strong Magnetic Interactions	program Science	term 60 months	amount $1,483,103

date Apr 2023	grant Making High-Temperature Superconductors at Ambient Pressure	program Science	term 36 months	amount $1,094,375

date Sep 2022	grant An Electrical Potential Atlas for Green Chemical Catalysis	program Science	term 38 months	amount $1,000,000

date Aug 2021	grant Advancing Design and Synthesis of Sustainable Polymers	program Other	term 26 months	amount $750,000

date Jul 2021	grant Max Shulaker Moore Inventor Fellow Award	program Science	term 36 months	amount $675,000

date May 2020	grant Pablo Jarillo-Herrero Experimental Investigator Award	program Science	term 60 months	amount $1,600,000

date May 2020	grant Nuh Gedik Experimental Investigator Award	program Science	term 60 months	amount $1,600,000

date Feb 2020	grant The Second Scialog: Chemical Machinery of the Cell II Research Competition	program Science	term 14 months	amount $56,250

date Nov 2019	grant Joseph Checkelsky Materials Synthesis Investigator	program Science	term 60 months	amount $1,870,000

date Jul 2019	grant Emergent Phenomena in Quantum Systems Theory Center	program Science	term 66 months	amount $1,157,219

date Nov 2018	grant Alternate and Augmented Reality Games for Public Engagement with Science	program Science	term 18 months	amount $840,400

date Nov 2018	grant Improving the Practice of Fact-checking in Journalism	program Other	term 24 months	amount $294,271

date Sep 2018	grant Seeing The Invisible: A New Revolution in Cell Biology through Infrared Imaging	program Science	term 40 months	amount $1,026,644

date Mar 2018	grant Fellows Support to Advance the Physics of Living Systems	program Science	term 60 months	amount $1,517,000

date May 2017	grant Development of a Quantum Gas Microscope for Ultracold Molecules	program Science	term 36 months	amount $1,138,613

date Feb 2017	grant New Instrumentation for Investigations of the Cosmic Dawn	program Science	term 60 months	amount $6,696,344

date Jul 2016	grant The Second Scialog: Molecules Come To Life Research Competition	program Science	term 14 months	amount $56,250

date Nov 2014	grant Nuh Gedik Experimental Investigator in Quantum Materials Award	program Science	term 60 months	amount $1,800,000

date Nov 2014	grant Pablo Jarillo-Herrero Experimental Investigator in Quantum Materials Award	program Science	term 60 months	amount $1,800,000

date Nov 2014	grant Fellows Support to Advance the Physics of Living Systems	program Science	term 50 months	amount $1,273,415

date Nov 2014	grant In Silico Simulation of Matter Driven Far from Equilibrium	program Science	term 38 months	amount $693,247

date Oct 2014	grant IMG-ProPortal: A data discovery environment for Prochlorococcus related ‘omics data	program Science	term 18 months	amount $594,000

date Sep 2014	grant Focused Ion Beam/Scanning Electron Microscope for Nanotechnology Research	program Science	term 12 months	amount $200,000

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Electron Beam Lithography System

Massachusetts Institute of Technology, Department of Physics

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